As with most "rare" man-made things, "rare" pinball machines are rare for a reason...nobody bought them, or they weren't deemed worthy to make it to mass-production. Most truly "rare" games are stinkers.
And I'm not knocking any of the games you listed, I really like most of them. The point I'm making is that at today's prices of manufacturing, and especially considering where technology in games has evolved to, I just can't picture there being a demand of more than 25-50 copies of any of them, even at say, 6k.
Would YOU buy a 6k Tag Team? A 6k Joker Poker? Maybe, but I'm guessing most people wouldn't.
The profit just isn't there for the potential manufacturer, and short of some small cottage type, no manufacturer is going to tool-up to make 25 games.